0~80mm
0~50mm
0~30mm
360o
-5o~70o
175mm
EBL;STM;AFM;Heating Stage;Cryo Stage;Tensile Stage;Micro-nano Manipulator;SEM+Coating Machine;SEM+Laser Etc.
CCD,X-Ray Detector(EDS),EBSD,CL,WDS,Coating Machine, Five Axes Motorized Stage Etc.